Power Feedthrough

Power Feedthrough

Looking for Feedthroughs with high-performance insulation and airtightness?

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Feature

  • Hermetically sealed with excellent insulation.
  • Insulation resistance (MΩ): over 1,000 (atDC1,000V)
  • Airtightness: 1×10-10Pa · m³/sec
  • It is the optimum tool for introducing power to the vacuum chamber and extraction of measurement and control signals.

We can make customized products to meet your special requests.

Standard Feedthrough
1K Volts / to 20 Amps

1K Volts / to 20 Amps

Volts Amps Conductor Flange Product Number Drawing
Size Material Quantity
1kV 3A φ1.6 Fe-Ni-Co 1 - PF-K1.6-1kV-3A PDF
20A Oxygen Free Copper
(JIS C1020)
1 - PF-C1.6-1kV-20A PDF
1K Volts / to 10 Amps

1K Volts / to 10 Amps

Volts Amps Conductor Flange Product Number Drawing
Size Material Quantity
1kV 5A *1 M3 Stainless Steel
(SUS304)
1 - PF-SM3-1kV-5A *1 PDF
1 ICF34 PF-SM3-1kV-5A-I34-1 *1 PDF
2 ICF70 PF-SM3-1kV-5A-I70-2 *1 PDF
10A Fe-Ni-Co 1 - PF-KM3-1kV-10A PDF
1 ICF34 PF-KM3-1kV-10A-I34-1 PDF
2 ICF70 PF-KM3-1kV-10A-I70-2 PDF

*1: Made to order. Please contact us for delivery time.

3K Volts / to 200 Amps

3K Volts / to 200 Amps

Volts Amps Conductor Flange Product Number Drawing
Size Material Quantity
3kV 10A M6 Stainless Steel
(SUS304)
1 - PF-SM6-3kV-10A PDF
1 ICF34 PF-SM6-3kV-10A-I34-1 PDF
1 ICF70 PF-SM6-3kV-10A-I70-1 PDF
2 ICF70 PF-SM6-3kV-10A-I70-2 PDF
M6 (L) 1 - PF-SM6-3kV-10A-L PDF
1 ICF34 PF-SM6-3kV-10A-L-I34-1 PDF
2 ICF70 PF-SM6-3kV-10A-L-I70-2 PDF
30A M10 1 - PF-SM10-3kV-30A PDF
1 ICF70 PF-SM10-3kV-30A-I70-1 PDF
2 ICF114 PF-SM10-3kV-30A-I114-2 PDF
100A M6 Oxygen Free Copper
(JIS C1020)
1 - PF-CM6-3kV-100A PDF
1 ICF34 PF-CM6-3kV-100A-I34-1 PDF
1 ICF70 PF-CM6-3kV-100A-I70-1 PDF
2 ICF70 PF-CM6-3kV-100A-I70-2 PDF
M6 (L) 1 - PF-CM6-3kV-100A-L PDF
1 ICF34 PF-CM6-3kV-100A-L-I34-1 PDF
2 ICF70 PF-CM6-3kV-100A-L-I70-2 PDF
200A M10 1 - PF-CM10-3kV-200A PDF
1 ICF70 PF-CM10-3kV-200A-I70-1 PDF
2 ICF114 PF-CM10-3kV-200A-I114-2 PDF
5K Volts / to 70 Amps

5K Volts / to 70 Amps

Volts Amps Conductor Flange Product Number Drawing
Size Material Quantity
5kV 8A M5 Stainless Steel
(SUS304)
1 - PF-SM5-5kV-8A PDF
1 ICF34 PF-SM5-5kV-8A-I34-1 PDF
2 ICF70 PF-SM5-5kV-8A-I70-2 PDF
70A Oxygen Free Copper
(JIS C1020)
1 - PF-CM5-5kV-70A PDF
1 ICF34 PF-CM5-5kV-70A-I34-1 PDF
2 ICF70 PF-CM5-5kV-70A-I70-2 PDF
12K Volts / to 100 Amps

12K Volts / to 100 Amps

Volts Amps Conductor Flange Product Number Drawing
Size Material Quantity
12kV 10A M6 Stainless Steel
(SUS304)
1 - PF-SM6-12kV-10A PDF
1 ICF34 PF-SM6-12kV-10A-I34-1 PDF
1 ICF70 PF-SM6-12kV-10A-I70-1 PDF
2 ICF70 PF-SM6-12kV-10A-I70-2 PDF
100A Oxygen Free Copper
(JIS C1020)
1 - PF-CM6-12kV-100A PDF
1 ICF34 PF-CM6-12kV-100A-I34-1 PDF
1 ICF70 PF-CM6-12kV-100A-I70-1 PDF
2 ICF70 PF-CM6-12kV-100A-I70-2 PDF
30K Volts / to 100 Amps

30K Volts / to 100 Amps

Volts Amps Conductor Flange Product Number Drawing
Size Material Quantity
30kV 10A *1 M6 Stainless Steel
(SUS304)
1 - PF-SM6-30kV-10A *1 PDF
1 ICF70 PF-SM6-30kV-10A-I70-1 *1 PDF
100A *1 Oxygen Free Copper
(JIS C1020)
1 - PF-CM6-30kV-100A *1 PDF
1 ICF70 PF-CM6-30kV-100A-I70-1 *1 PDF

*1: Made to order. Please contact us for delivery time.

Current capacity varies depending on conductor material

Allowable current value

Diameter Cross Section (mm²) Current Capacity (A)
Oxygen Free Copper
(JIS C1020)
Fe-Ni-Co Stainless Steel
(SUS304)
M3 7.07 40.0 8.0 6.5
M5 19.63 83.5 16.5 13.5
M6 28.27 109.0 21.5 17.5
M10 78.54 225.0 44.5 36.5

Temperature: 40°C, Temperature Rise: 40°C, Frequency: 50Hz

Customized Feedthrough

If requested, we can customize hermetically-sealed feedthroughs by selecting proper parts that suit your equipment and operating environment.

Dimension and shapes of Ceramics

Since our ceramics are in-house products, we can change ceramics' shapes and dimensions according to your preferences. Ex) lengthening the creepage distance, applying discharge measures, etc.
We can also change the content of alumina (92%, 96%, 99%).

Materials of electrode

You can change the electrode material with other materials, such as nickel, titanium, alumel, chromel, etc.


Electrode(Cu,SUS,Kovar,Ni,Ti,etc.)

We make Ni plating on the electrode.


Complete nonmagnetic
feedthrough adopting
titanium electrode
(center conductor)

Allowable current value

Diameter
(mm)
Cross Section
(mm²)
Allowable current value (A)
Oxygen Free Copper
(JIS C1020)
Fe-Ni-Co Stainless Steel
(SUS304)
3 7.07 40.0 8.0 6.5
5 19.63 83.5 16.5 13.5
6 28.27 109.0 21.5 17.5
10 78.54 225.0 44.5 36.5

Temperature: 40°C, Temperature Rise: 40°C, Frequency: 50Hz
* Cross section and materials will be selected by current value.

About Metallizing technology

Shape of the electrode

Changing the shape of electrode is available.


  • Straight-shaped

  • Screws-shaped

  • Electrode with terminal plate

  • Electrode with BNC

Welding to flange


  • Welding

  • Brazing

  • Feed through + flange

You can weld and braze accessories, including flanges.

Special feedthrough

Production of special feedthroughs is also available.

About Metallizing technology


  • Heater-feed through

  • High frequency feed through

  • Thermocouple

  • Fluid feed through
Fluid Feedthrough
We were initially a pottery manufacturing company.
  • Standard Specification.
  • Welding to various vacuum flanges is also available.
  • Customized product
  • In-house produced ceramics.
  • Changes in shape and dimensions are also available.
  • It is convenient for mitigating the heat effect in heat sources for film deposition such as organic EL or LED.

For the use near the heat source

When the heat source is directly connected to the center conductor, the center conductor generates heat from the heat source.
As a solution, we water-cool the center conductor to alleviate the heat effect of the heat source and to suppress further heat generation.

Standard type

Specification

Insulation resistance(MΩ): over 1000 (at DC500V), Airtightness characteristics: 1×10-10Pa·m³/sec

* The two Swagelok tubes on the equipment have the same outer diameter
* Recommend ICF 70 rotary flange (fine adjustment at installation)

Resistence voltage Allowable current value Size (mm)
ΦD1 ΦD2 L1 L2
3kV 200A Φ16 Φ26 184* 80*

Though electrode diameter cannot be changed, dimensions of L1 and L2 can be changed.

We use commercial equipment for the cooling fitting part. (Please select one from the list below)

Common specification

Fixed size parts.

  • Diameter of Ceramic: 3kV (Withstand voltage)
  • Upper and lower Ceramic metal fittings size
  • Vacuum side electrode diameter: φ16
Customized

Resizable parts

  • Electrode length & structure
  • Battledore terminal
  • Size of cooling connecter
  • Flange connecting
* Cooling connecter (TMT connecter)

NTR screws (Based on the U.S. standard)

Tube outside diameter NTR male screw size Diamension
A Ax D E* F
(inch) (inch) (mm) (mm) (mm) (mm) (inch)
1/8 1/8 41.4 23.6 12.7 2.3 7/16
1/4 48 24.6 12.7 2.3 1.2
3/16 1/8 42.2 24.4 13.7 3.0 7/16
1/4 1/8 45.7 26.9 15.2 4.8 1/2
1/4 50.3 26.9 15.2 4.8 1/2
3/8 3/8 61.5 33.3 16.8 7.1 13/16
1/2 3/8 64.3 36.1 22.9 9.7 13/16
(inch) (inch) (mm) (mm) (mm) (mm) (inch)
6 1/8 45.8 27.0 15.3 4.8 1/2
1/4 50.3 27.0 15.3 4.8 1/2
8 1/4 55.3 29.9 16.2 6.4 5/8

* Column E shows the minimum diameter of nominal holes. The diameter of a hole for the pipe thread/ parallel thread end can be larger than the inside diameter.

* Rotating flange

For a rotating flange, It is relatively simpler to position and cool the winged terminals.

Metallized & Brazed Product

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